Résumé du preprint DAPNIA-05-210
| DAPNIA-05-210 |
|---|
| An electron-multiplying Micromegas grid made in Silicon-wafer postprocessing technology |
| M. Chefdeville, P. Colas, Y. Giomataris, Harry van der Graaf, E.H.M. Heijne, S. van der Putten, C. Salm, J. Schmitz, S. Smits, J. Timmermans, J.L. Visschers |
A technology for manufacturing an aluminium grid onto a silicon wafer has been developed (...) With this newly developed technology, CMOS (pixel) readout chip can be covered with a gas multiplication grid. Such a chip forms, together with the grid, an integrated device which can be applied as a readout in a large range of gaseous detectors. |
